FPM-Particle

Thin glass substrates inspection for a statistical analysis of particle distribution

Individual or multiple sensor set-up for inspection of web or complete substrate

Complete product range for surface and edge inspection, plus review station

Extremely short inspection line for thin glass substrates

Sub micron particle counting

> 99,9 % Classification top side/bottom side

Reliable particle counting for monitoring clean room quality

FPM-Particle inspects thin glass substrates with high precision, providing a statistical analysis of particle distribution. With high resolution cameras and special illumination technology, the system detects particles down to the micrometer range and classifies them by size. It, therefore, delivers reliable data for monitoring clean room quality and optimizing the cleaning process.

Users can add the extension products FPM-Inspect, FPM-Edge and FPM-Review to enhance the particle inspection with surface and edge inspection, as well as an automatic microscope for investigating detected defects.