Surface Defects

Long-term increase in production yield with 100% inline inspection, even at high inspection speeds. Using patented MultiView technology, our systems reliably identify and classify macro defects, handling scratches or etching residues. This way, defective wafers can be removed from the process early on.


Inline Surface Inspection of Wafers

Optical inline surface inspection determines whether wafer quality is sufficient for delivery to customers. As an optional feature, the coating on the rear side can be checked for evenness.


Inline Surface Inspection of Wafer Edges

The rotating sensor scans the wafer edge from three perspectives, thus ensuring defect detection to the outermost edge of the wafer.