ISO-TEST is a contact-based system for checking the insulation resistance between the front and rear side of a wafer. Inspection takes place immediately after wet-chemical edge isolation. The insulation resistance is automatically measured at each edge individually and then at all edges in parallel. ISO-TEST reliably detects over and underetching on the wafer edge.
The system offers maximum process control and features an innovative product design. With its ergonomic design, the system is easy to handle and highly reliable. These factors earned ISO-TEST the 2012 iF product design award.