Inline Wafer Inspection

Custom solutions for inline wafer inspection help optimize product throughput, even at the highest line speeds. By prioritizing accuracy requirements, throughput, and machine design, we offer solutions, such as those in wafer input, to ensure the required quality for wafer sizes up to M12 and beyond. 


Geometry measurement and contour inspection

Reliable identification of geometric irregularities and edge distortions.


Surface inspection

Reliable identification of even low-contrast visual defects on the wafer surface for 100% inspection in wafer production.


Microcrack detection

Full inline wafer monitoring for microcracks.


Photoluminescence (PL) inspection for wafers

Non-contact inspection for identifying microcracks and material defects while also determining the efficiency potential.