This page shows all inspection solutions for the back end process

back end process

Inspection solutions for the back end process


  • Quality control: ensure the highest quality standards
  • Increased yield: identify and adjust process deviations early
  • Enhanced reliability: eliminate any potential defects that could impact device performance

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Back End Process

Achieve higher yields, enhanced traceability, and faster ROI with zero-defect quality chip production: Our combinable 2D and 3D analysis systems significantly improve quality assurance by inspecting all chips individually and evaluating the integrated circuit packaging. Integrated at the interface between the front-end and back-end, ISRA inspection systems detect defects in individual components at the wafer level and in the dicing frame. This 100% inspection ensures that only flawless material is sent to the customer.

Wafer Level Bonding

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The downsizing of electronic devices is challenging semiconductor manufacturers to produce smaller component sizes while maintaining tighter process control requirements. 

ISRA VISION's wafer inspection solutions for advanced wafer-level packaging ensure traceability throughout the semiconductor manufacturing process. Our systems provide superior quality control for improved device performance, enabling manufacturers to detect, resolve and monitor process deviations in a timely manner.

Benefits

Efficiency: simultaneous scanning of the bulk wafer material, and the wafer edge

Flexibility: seamless integration into existing process lines

Increased uptime: minimize wafer breakage during processing

Features, typical defects and technical data

Features

  • Reliable defect detection and classification 
  • Defect detection down to <5 µm crack width
  • Wafer mapping / 2D coordination map
  • Throughput: up to 180 wph
  • Edge inspection tool integrated into pre-aligner

Typical defects

  • Microcracks inside the bulk wafer material

  • Edge chippings

  • Cracks near edge 

  • Edge contaminations

Technical data

  • High-resolution line scan cameras with LED line illumination using different wavelengths

  • Integrated adjustment of thresholds and crack characteristics for sensitive optimization of the detection result

  • Typ. resolution: 20 μm, optional down to 1.5 μm

  • Semi standard interface

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Re-Thinning

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Re-thinning can introduce defects on the wafer's surface that can impact the performance and functionality of the final semiconductor device.

Therefore, optical inspection after re-thinning is crucial to detect defects that could impact device functionality.

Conducting optical inspection after the re-thinning process allows manufacturers to minimize the risk of defects and ensure that the final semiconductor devices meet the required performance and reliability standards. This helps to enhance the overall quality and yield of the semiconductor manufacturing process.

Benefits

Efficiency: simultaneous scanning of bulk and surface at line speeds of up to 180 wafers/hour

Flexibility: seamless integration into existing process lines

Increased uptime: minimize wafer breakage during processing

Customized, seamless integration into wafer handling solutions

100% control of the re-thinned wafer edge in parallel to other process steps - no influence on existing cycle times

Features, typical defects and technical data

Features

  • Reliable defect detection and classification
  • Defect detection down to <5 µm crack width
  • Wafer mapping / 2D coordination map
  • Process control of cracks/chip-outs at the re-thinned wafer edge
  • Throughput: up to 180 wph
  • Edge inspection tool integrated into pre-aligner

 

 

Typical defects

  • Microcracks inside the bulk wafer material
  • Edge chippings
  • Cracks near edge 
  • Contaminations 

 

 

 

Technical data

  • High-resolution line scan cameras with LED line illumination using different wavelengths
  • Integrated adjustment of thresholds and crack characteristics for sensitive optimization of the detection result
  • Typ. resolution for microcrack inspection: 20 μm, optional down to 1.5 μm
  • Pixel resolution for edge inspection: typ. 3 μm/px
  • Integration with thin wafer handling
  • Semi standard interface

Download additional information

Post-Dicing Inspection 100% inspection of dicing streets in semiconductor manufacturing

dicing inspection

Dicing wafers carries the risk of defects in the dicing streets. Accurate inspection of the dicing street reliably detects these defects and minimizes the scrap rate of chips and dies. The DicingScan inspection tool provides 100% wafer inspection. High-performance line scan cameras precisely detect defects such as edge chippings in the dicing streets. In addition, the tool checks the presence, position, and completeness of the dicing streets.

With our patented MultiView imaging technology, which forms the basis of the WafQScan process, users can also inspect the rear side of the wafer through the carrier tape (foil). DicingScan ensures that only dies/chips of impeccable quality are processed.

Benefits

Efficiency: Multiple inspection tasks in one scan

100% quality control: Only high-quality dies and chips are processed

Features, typical defects and technical data

Features
 
  • Dicing street inspection immediately after dicing

  • (Micro-)crack inspection on dies

  • Check the position, integrity, and quality of dicing strees

  • Front and rear side inspection, even through the carrier tape 

Typical defects

  • Uncompleted dicing

  • Cracks

  • Bubbles

  • Releases 

  • Chip-outs

Technical data
 
  • MultiView technology with simultaneous image capturing

  • Semi standard interface

Customer service & training 고객 서비스 & 교육

Service

생산 시스템의 효율적이고 미래 지향적인 운영을 위해 우수한 자격을 갖춘 서비스팀이 모든 문제에 대해 전 세계적으로 고객을 지원합니다. 연중무휴 24시간 신속하고 안정적으로 시스템의 구현, 유지보수 및 서비스는 물론 분석 및 최적화를 제공합니다.

서비스 센터를 방문하여 맞춤형 서비스 솔루션을 요청하세요.

또한 유능한 트레이너를 통해 시스템 운영자, 제품 엔지니어 및 품질 관리자가 진정한 검사 전문가가 될 수 있도록 직원들에게 항상 최신 지식을 제공하는 방법을 알아보시려면  ISRA 아카데미를 방문하세요.

ISRA 아카데미를 방문하여 개별적이고 확장 가능한 교육을 예약하십시오..

 

 

Contact us

Johann Weixlberger

Director Sales SEMI-EL

Hainbuchenring 9-11
82061 Neuried
germany