Increase yield while ensuring the highest quality and process reliability, even in ongoing wafer production.
Our inline optical inspection systems reliably detect defects on the surface, at the edge and inside the bulk wafer material to significantly increase your production capacity. Save costs by removing defective material before it reaches the next stage of the production process.
CMP eliminates micro peaks and valleys.
However, microcracks in the bulk wafer material or at the wafer edge can lead to wafer breakage during polishing or other downstream processes, resulting in high costs. Defective wafers must be rejected in time to avoid expensive cleaning and extended machine downtime.
Features
Typical defects
Technical data
Improve production yields with 100% in-line inspection, even at high inspection speeds. Using patented MultiView technology, our systems reliably identify and classify macro defects, handling scratches or etch residues. This allows defective wafers to be removed from the process at an early stage.
Features
Typical defects
Technical data
Wafer planarity is essential for perfect assembly. SpecGAGE3D is a compact solution for efficient quality inspection of reflective surfaces. Using deflectometry, height deviations, and defects are reliably detected in a single measurement.
The measurement data is compared to the CAD data, and differences are evaluated within seconds. The system quickly and efficiently determines whether the manufactured wafers are within the required dimensional tolerances. This enables users to minimize production waste while optimizing processes and machine settings.
Integrated into fully automated production lines, SpecGAGE3D permanently improves the process and reduces production costs.
Typical defects
생산 시스템의 효율적이고 미래 지향적인 운영을 위해 우수한 자격을 갖춘 서비스팀이 모든 문제에 대해 전 세계적으로 고객을 지원합니다. 연중무휴 24시간 신속하고 안정적으로 시스템의 구현, 유지보수 및 서비스는 물론 분석 및 최적화를 제공합니다.
서비스 센터를 방문하여 맞춤형 서비스 솔루션을 요청하세요.
또한 유능한 트레이너를 통해 시스템 운영자, 제품 엔지니어 및 품질 관리자가 진정한 검사 전문가가 될 수 있도록 직원들에게 항상 최신 지식을 제공하는 방법을 알아보시려면 ISRA 아카데미를 방문하세요.
ISRA 아카데미를 방문하여 개별적이고 확장 가능한 교육을 예약하십시오..
Director Sales SEMI-EL
Hainbuchenring 9-11
82061 Neuried
germany