WafQScan

Reliable detection of defects, such as contaminations or micro scratches

Excellent defect detection on semiconductor wafer surfaces

WafQScan enables 100% inline surface inspection of semiconductor wafers. Using pixel-synchronous images captured under different illumination scenarios, the patented MultiView technology ensures excellent defect detection rates in a single scan. WafQScan is the ideal solution for applications for bare, cut and processed wafers.

Defect detection on wafer surfaces with WafQScan

The system reliably detects all defects, such as contaminations and etching residues. By identifying defects early on and ejecting defective wafers, WafQScan ensures maximum yield and optimum capacity utilization. Users thus benefit from a quick return on investment.

Complementing the system with the EdgeScan option, users can conduct optical inspection of the wafer edge, in addition to the surface inspection. 

  • MultiView-technology with adapted wavelength and resolution
  • Manual or fully automated configurations
  • Inspection module with SEMI hard- and software interface

Download additional information

Automotive Overview brochure

WafQScan brochure en

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brochure-wafqscan-semiconductor-en.pdf
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WafQScan brochure cn

WafQScan brochure cn
Filename
brochure-wafqscan-semiconductor-cn.pdf
Size
339 KB
Format
application/pdf
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Discover the full range of applications for WafQScan

Wafer Production

Surface inspection for semiconductor wafers: WafQScan reliably detects defects such as contaminations or micro scratches with multiview technology.
wafer production

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