CrackScan
Optical inspection system identifies and locates smallest cracks inside bulk wafer material
EdgeScan
100% wafer edge inspection and reliable defect detection
SpecGAGE3D
Automatic surface inspection of highly reflective objects
WafQScan
Reliable detection of defects, such as contaminations or micro scratches
CrackScan
Optical inspection system identifies and locates smallest cracks inside bulk wafer material
DicingScan
100% inspection of dicing streets in semiconductor manufacturing
EdgeScan
100% wafer edge inspection and reliable defect detection